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SitemapThis application uses a Capacitive Proximity Sensor with a fluororesin body for excellent resistance to chemicals and oils.
This Capacitive Proximity Sensor can detect passage of wafers in a chemical washing process. Its all-fluororesin casing ensures excellent resistance to chemicals and oils. It also has a sensitivity adjuster to change the detection distance according to the workpiece.
Know-How
Conventional sensors could fail due to the adverse effects of sprayed chemicals. Also, fluororesin optical sensors could not provide stable detection due to the effects of residual chemicals or drops of cleaning water.
Benefit / Efficiency
The use of a fluororesin body ensures excellent resistance to chemicals and oils. You can install the Sensor in essentially any environment.
A Capacitive Sensor can detect both silicon and glass wafers.
Application No.47
Applicable Product
Chemical-resistant Proximity Sensor
E2KQ-X
Easy Sensing Distance Adjustment and Fluororesin Coating That Effectively Resists Oils and Chemicals
Other Applications
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